Fhr.de
- Title
- Sputter systems, sputtering targets and vacuum process equipment by FHR - Products
- Meta Description
- From FHR you can buy vacuum coating equipment and sputtering targets. FHR Anlagenbau is a manufacturer and supplier of magnetron sputtering systems as well as thin film equipment with integrated PVD, PECVD and ALD technologies. FHR delivers also vacuum process equipment for etching (ISE, PE, RIE), annealing (FLA, RTP) and UV ozone cleaning (UVOH).
- Meta Keywords
- sputter, sputtering, deposition, coating, vacuum, evaporation, vapour, PVD, CVD, plasma, PECVD, UVOH, UV ozone, cleaning, thin film, glass, semiconductor, foil, sputter deposition, sputtering target, target materials, rotatable target,bluepage-cms
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